History: Rotary Vane Vacuum Pump
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r193835 · current
- Created Rotary Vane Vacuum Pump (part): "Evacuates the work tube before backfilling with gas and pumps down quartz ampoules before sealing. Two-stage oil-sealed pump of about 4 to 10 m³/h with an ultimate pressure of a few mTorr, a KF25 inlet and an exhaust mist filter."