Process Gas Inlet
PartNeedle valve and mass-flow controller metering noble gas inlet to ion source, 0.1–1 sccm range. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Needle valve and mass-flow controller metering noble gas inlet to ion source, 0.1–1 sccm range. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.