Ion Assistance Module
AssemblyLow-energy ion gun bombarding growing film with 50–500 eV Ar⁺ or Xe⁺ ions for dense, stress-free coating. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Ion Assistance Module
5 top-level lines as of r5461| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Ion Source | ar-coating-ion-source | 1× | 1 | · | part |
| 2 | Ion Accelerator Grid | ar-coating-ion-accelerator | 1× | 1 | · | part |
| 3 | Ion Supply Voltage | ar-coating-ion-current-supply | 1× | 1 | · | part |
| 4 | Process Gas Inlet | ar-coating-gas-inlet | 1× | 1 | · | part |
| 5 | Ion-Beam Shaping Magnet | ar-coating-magnet | 1× | 1 | · | part |