Thin-Film Thickness Monitor
AssemblyQuartz-crystal or laser-optical real-time monitor tracking deposited layer thickness and triggering source shutoff. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Thin-Film Thickness Monitor
3 top-level lines as of r5473| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Quartz Crystal Monitor | ar-coating-quartz-monitor | 1× | 1 | · | part |
| 2 | Monitor Electronics | ar-coating-monitor-electronics | 1× | 1 | · | part |
| 3 | Laser Reflectance Monitor | ar-coating-laser-monitor | 1× | 1 | · | part |