Vacuum Chamber
AssemblyStainless steel or aluminum chamber with ports for pumps, gauges, and process equipment, sealed with elastomer O-rings. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum Chamber
5 top-level lines as of r5443| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Chamber Vessel | ar-coating-chamber-vessel | 1× | 1 | · | part |
| 2 | Chamber Access Lid | ar-coating-chamber-lid | 1× | 1 | · | part |
| 3 | Vacuum Feedthrough | ar-coating-chamber-feedthrough | 4× | 4 | · | part |
| 4 | Rough Pump | ar-coating-rough-pump | 1× | 1 | · | part |
| 5 | Diffusion Pump | ar-coating-diffusion-pump | 1× | 1 | · | part |