Analyzer Arm Assembly
AssemblyMotorized rotating analyzer optic and light-collection optics. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Analyzer Arm Assembly
4 top-level lines as of r57549| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Analyzer Servo Motor | ellipsometer-servo-motor-a | 1× | 1 | · | part |
| 2 | Analyzer Filter | ellipsometer-analyzer-optic | 1× | 1 | · | part |
| 3 | Collection Optics | ellipsometer-collection-lens | 1× | 1 | · | part |
| 4 | Analyzer Encoder | ellipsometer-encoder-a | 1× | 1 | · | part |