Calibration Assembly
AssemblyReference films and alignment fixtures for system qualification. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Calibration Assembly
3 top-level lines as of r57573| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Reference Thin-Film Substrate | ellipsometer-reference-substrate | 1× | 1 | · | part |
| 2 | Calibration Holder | ellipsometer-calibration-holder | 1× | 1 | · | part |
| 3 | Alignment He-Ne Laser | ellipsometer-alignment-laser | 1× | 1 | · | part |