Sample Stage Assembly
AssemblyMotorized goniometer with azimuth and incident-angle control, vacuum chuck. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Sample Stage Assembly
5 top-level lines as of r57543| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Goniometer Base | ellipsometer-goniometer-base | 1× | 1 | · | part |
| 2 | Azimuth Motor | ellipsometer-azimuth-motor | 1× | 1 | · | part |
| 3 | Azimuth Encoder | ellipsometer-azimuth-encoder | 1× | 1 | · | part |
| 4 | Vacuum Chuck | ellipsometer-sample-chuck | 1× | 1 | · | part |
| 5 | Incident Angle Scale | ellipsometer-angle-scale | 1× | 1 | · | part |