Slurry Delivery System
AssemblyCirculating pump dispensing cerium oxide or aluminum oxide polishing compound suspension to polishing heads with flow control. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Slurry Delivery System
6 top-level lines as of r97854| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Slurry Pump | lens-polisher-slurry-pump | 1× | 1 | · | part |
| 2 | Slurry Reservoir | lens-polisher-slurry-tank | 1× | 1 | · | part |
| 3 | Slurry Cooler | lens-polisher-slurry-chiller | 1× | 1 | · | part |
| 4 | Slurry Nozzle | lens-polisher-slurry-nozzle | 2× | 2 | · | part |
| 5 | Slurry Filter | lens-polisher-slurry-filter | 1× | 1 | · | part |
| 6 | Pressure Sensor | pressure-sensor | 1× | 1 | · | part |