Piezo Z-Stage
AssemblyPiezoelectric stack actuator for 0–100 µm vertical travel at nanometer increments. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Piezo Z-Stage
4 top-level lines as of r117396| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Piezo Stack Actuator | optical-profilometer-piezo-stack | 1× | 1 | · | part |
| 2 | Bearing / Mechanism | optical-profilometer-z-bearing | 1× | 1 | · | part |
| 3 | Z Position Sensor | optical-profilometer-z-position-sensor | 1× | 1 | · | part |
| 4 | Z-Stage Controller IC | optical-profilometer-z-controller | 1× | 1 | · | part |