Vacuum System
AssemblyA backing rotary-vane pump roughs the chamber and two turbomolecular pumps pull the analyzer region to high vacuum, with gauges and isolation valves staging the pressure drop. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum System
7 top-level lines as of r103243| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Vacuum Chamber / Manifold | mass-spectrometer-vacuum-chamber | 1× | 1 | · | part |
| 2 | Backing / Roughing Pump 4 parts | mass-spectrometer-backing-pump | 1× | 1 | 0 | assembly |
| 3 | Turbomolecular Pump | turbo-pump | 2× | 2 | · | part |
| 4 | Vacuum Gauge | mass-spectrometer-vacuum-gauge | 2× | 2 | · | part |
| 5 | Isolation Valve | mass-spectrometer-isolation-valve | 2× | 2 | · | part |
| 6 | Vent Valve | mass-spectrometer-vent-valve | 1× | 1 | · | part |
| 7 | O-Ring Set | oring-set | 2× | 2 | · | part |