Electron Column
AssemblyA heated or field-emission source emits electrons that an accelerating anode pulls into a beam; condenser and objective electromagnetic lenses demagnify it to a fine probe, apertures trim its tails, and scan coils sweep it across the sample. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Electron Column
8 top-level lines as of r56898| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Electron Gun 3 parts | sem-electron-gun | 1× | 1 | 0 | assembly |
| 2 | Accelerating Anode | sem-anode | 1× | 1 | · | part |
| 3 | Condenser Lens 3 parts | sem-condenser-lens | 2× | 2 | 0 | assembly |
| 4 | Objective Lens 3 parts | sem-objective-lens | 1× | 1 | 0 | assembly |
| 5 | Aperture Strip | sem-aperture-strip | 1× | 1 | · | part |
| 6 | Scan Deflection Coils | sem-scan-coil | 1× | 1 | · | part |
| 7 | Stigmator | sem-stigmator | 1× | 1 | · | part |
| 8 | Column Body | sem-column-body | 1× | 1 | · | part |