Vacuum System
AssemblyA rotary roughing pump backs a turbomolecular pump that evacuates the column and chamber to high vacuum, with gauges and valves staging the pump-down. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum System
5 top-level lines as of r56923| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Turbomolecular Pump | turbo-pump | 1× | 1 | · | part |
| 2 | Roughing Pump 4 parts | sem-roughing-pump | 1× | 1 | 0 | assembly |
| 3 | Vacuum Gauge 3 parts | sem-vacuum-gauge | 2× | 2 | 0 | assembly |
| 4 | Vacuum Isolation Valve | sem-vacuum-valve | 2× | 2 | · | part |
| 5 | O-Ring Set | oring-set | 2× | 2 | · | part |