Vacuum Pump Unit
AssemblySingle integrated turbomolecular pump with rotary backing pump achieving <1×10⁻⁵ Torr. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum Pump Unit
5 top-level lines as of r169157| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Turbomolecular Rotor | tabletop-electron-microscope-turbo-rotor | 1× | 1 | · | part |
| 2 | Roughing Pump | tabletop-electron-microscope-roughing-pump | 1× | 1 | · | part |
| 3 | Pump Controller | tabletop-electron-microscope-pump-controller | 1× | 1 | · | part |
| 4 | Vacuum Gauge | tabletop-electron-microscope-vacuum-gauge | 1× | 1 | · | part |
| 5 | Isolation Valve | tabletop-electron-microscope-isolation-valve | 1× | 1 | · | part |