Specimen Stage
AssemblyA motorized eucentric stage positions the sample in five axes on ball-screw drives and rolling bearings, all inside the vacuum chamber. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Specimen Stage
5 top-level lines as of r56911| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Stage Axis Motor 4 parts | sem-stage-motor | 5× | 5 | 0 | assembly |
| 2 | Ball Screw | ball-screw | 3× | 3 | · | part |
| 3 | Ball Bearing | ball-bearing | 8× | 8 | · | part |
| 4 | Specimen Holder | sem-specimen-holder | 1× | 1 | · | part |
| 5 | Stage Frame | sem-stage-frame | 1× | 1 | · | part |