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Roughing Pump

Assembly

Rotary or dry pump that evacuates the chamber from atmosphere to a low base pressure. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.

Bill of materials for Roughing Pump

4 top-level lines as of r69467
# Item / sub-assembly Part no. Qty/assy Ext. qty Parts Type
1 Pump Rotor fds-pump-rotor 1 · part
2 Servo Motor 4 parts servo-motor 1 0 assembly
3 Oil Seal oil-seal 2 · part
4 Ball Bearing ball-bearing 2 · part