Vacuum Pump
AssemblyPump evacuating the chamber and removing non-condensable gases during the run. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum Pump
4 top-level lines as of r181432| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Pump Rotor | vbd-pump-rotor | 1× | 1 | · | part |
| 2 | Servo Motor 4 parts | servo-motor | 1× | 1 | 0 | assembly |
| 3 | Oil Seal | oil-seal | 2× | 2 | · | part |
| 4 | Ball Bearing | ball-bearing | 2× | 2 | · | part |