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Vacuum System

Assembly

The roughing and high-vacuum pumps and gauges that pull the chamber down to working pressure. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.

Bill of materials for Vacuum System

6 top-level lines as of r56866
# Item / sub-assembly Part no. Qty/assy Ext. qty Parts Type
1 Roughing Pump electron-beam-welder-roughing-pump 1× 1 · part
2 Turbomolecular Pump turbo-pump 1× 1 · part
3 Vacuum Valve electron-beam-welder-vacuum-valve 3× 3 · part
4 Vacuum Gauge electron-beam-welder-vacuum-gauge 2× 2 · part
5 Pumping Manifold electron-beam-welder-vacuum-manifold 1× 1 · part
6 O-Ring Set oring-set 4× 4 · part