Load Lock Vacuum Pump
PartSmall rotary vane pump evacuating load lock chamber to 0.1 mbar before main furnace opening. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Small rotary vane pump evacuating load lock chamber to 0.1 mbar before main furnace opening. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.