Load Lock Chamber
AssemblySecondary chamber allowing part insertion without venting main furnace to atmosphere. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Load Lock Chamber
4 top-level lines as of r181884| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Load Lock Door | vacuum-heat-treat-furnace-load-lock-door | 1× | 1 | · | part |
| 2 | Load Lock Vacuum Pump | vacuum-heat-treat-furnace-load-lock-pump | 1× | 1 | · | part |
| 3 | Load Lock Isolation Valve | vacuum-heat-treat-furnace-load-lock-valve | 1× | 1 | · | part |
| 4 | Load Lock Vent Valve | vacuum-heat-treat-furnace-load-lock-vent | 1× | 1 | · | part |