Vacuum Pump System
AssemblyTwo-stage vacuum system (rotary vane primary, turbomolecular secondary) achieving <0.01 mbar. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum Pump System
4 top-level lines as of r181854| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Rotary Vane Pump | vacuum-heat-treat-furnace-rotary-vane | 1× | 1 | · | part |
| 2 | Turbomolecular Pump | vacuum-heat-treat-furnace-turbomol | 1× | 1 | · | part |
| 3 | Vacuum Pressure Gauge | vacuum-heat-treat-furnace-vacuum-gauge | 1× | 1 | · | part |
| 4 | Isolation Valve | vacuum-heat-treat-furnace-isolation-valve | 1× | 1 | · | part |