Alignment Optics
AssemblyMicroscope and alignment mark detection for precise mask-to-wafer overlay measurement. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Alignment Optics
4 top-level lines as of r103186| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | CMOS Image Sensor | image-sensor | 1× | 1 | · | part |
| 2 | Lens Assembly | camera-lens | 1× | 1 | · | part |
| 3 | Beam Splitter | mask-aligner-beam-splitter | 1× | 1 | · | part |
| 4 | Alignment LED | mask-aligner-alignment-light | 1× | 1 | · | part |