Focus Control
AssemblyAutofocus system maintaining wafer-mask gap at optimal distance for exposure uniformity. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Focus Control
3 top-level lines as of r103187| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Z-Axis Motor | mask-aligner-z-motor | 1× | 1 | · | part |
| 2 | Focus Sensor | mask-aligner-focus-sensor | 1× | 1 | · | part |
| 3 | Focus PID | mask-aligner-focus-controller | 1× | 1 | · | part |