Mask Stage Assembly
AssemblyPrecision holder and positioning for photomask with fine XY and theta adjustment. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Mask Stage Assembly
4 top-level lines as of r103184| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Reticle Holder | mask-aligner-reticle-holder | 1× | 1 | · | part |
| 2 | Mask XY Stage | mask-aligner-mask-xy-stage | 1× | 1 | · | part |
| 3 | Encoder | encoder | 1× | 1 | · | part |
| 4 | Mask Chuck | mask-aligner-mask-chuck | 1× | 1 | · | part |