UV Light Source
AssemblyHigh-intensity lamp emitting 365–436 nm wavelength for photoresist exposure. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for UV Light Source
4 top-level lines as of r103183| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Mercury Lamp | mask-aligner-mercury-lamp | 1× | 1 | · | part |
| 2 | Lamp Ballast | mask-aligner-ballast | 1× | 1 | · | part |
| 3 | Reflector Optics | mask-aligner-reflector | 1× | 1 | · | part |
| 4 | Collimating Lens | mask-aligner-collimating-lens | 1× | 1 | · | part |