Chamber Cooling & Temperature Control
AssemblyWater-cooled chamber jacket and thermostatically controlled substrate heater preventing thermal cycling stress. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Chamber Cooling & Temperature Control
6 top-level lines as of r131524| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Coolant Pump | coolant-pump | 1× | 1 | · | part |
| 2 | Radiator | radiator | 1× | 1 | · | part |
| 3 | Pressure Sensor | pressure-sensor | 1× | 1 | · | part |
| 4 | Heating Element | heating-element | 1× | 1 | · | part |
| 5 | Connector | connector | 3× | 3 | · | part |
| 6 | Fastener Set | fastener-set | 1× | 1 | · | part |