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Vacuum Pump Package

Assembly

Two-stage vacuum: rotary-vane backing pump and turbomolecular pump achieving <10⁻⁵ Torr. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.

Bill of materials for Vacuum Pump Package

4 top-level lines as of r131525
# Item / sub-assembly Part no. Qty/assy Ext. qty Parts Type
1 Blower Motor blower-motor 2× 2 · part
2 Pressure Sensor pressure-sensor 1× 1 · part
3 Connector connector 2× 2 · part
4 Fastener Set fastener-set 2× 2 · part