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Dispense System

Assembly

Programmable liquid dispenser with fixed or moving nozzle for resist or coating application. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.

Bill of materials for Dispense System

4 top-level lines as of r161742
# Item / sub-assembly Part no. Qty/assy Ext. qty Parts Type
1 Syringe Pump spin-coater-syringe-pump 1× 1 · part
2 Dispense Nozzle spin-coater-nozzle 1× 1 · part
3 Dispense Arm spin-coater-dispense-arm 1× 1 · part
4 Heated Reservoir spin-coater-reservoir 1× 1 · part