Liquid Supply
AssemblyFiltered and temperature-controlled photoresist or coating dispense system. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Liquid Supply
4 top-level lines as of r161746| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Supply Bottle | spin-coater-supply-bottle | 1× | 1 | · | part |
| 2 | Inline Filter | spin-coater-filter | 1× | 1 | · | part |
| 3 | Heater Cartridge | spin-coater-heater | 1× | 1 | · | part |
| 4 | Pressure Regulator | spin-coater-pressure-regulator | 1× | 1 | · | part |