Spindle Assembly
AssemblyHigh-speed rotating motor with precision chuck and vacuum wafer clamping. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Spindle Assembly
5 top-level lines as of r161741| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Spindle Motor | spin-coater-motor | 1× | 1 | · | part |
| 2 | Vacuum Chuck | spin-coater-chuck | 1× | 1 | · | part |
| 3 | High-Speed Bearing | spin-coater-bearing | 2× | 2 | · | part |
| 4 | Drive Belt | spin-coater-drive-belt | 1× | 1 | · | part |
| 5 | Speed Encoder | spin-coater-encoder | 1× | 1 | · | part |