Vacuum System
AssemblyPump and regulator supplying consistent chuck vacuum for wafer hold. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vacuum System
3 top-level lines as of r161744| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Vacuum Pump | spin-coater-vac-pump | 1× | 1 | · | part |
| 2 | Vacuum Regulator | spin-coater-regulator | 1× | 1 | · | part |
| 3 | Relay | relay | 1× | 1 | · | part |