Vision System
AssemblyOptical probe for film thickness measurement and edge detection. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Vision System
3 top-level lines as of r161747| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Thickness Probe | spin-coater-thickness-probe | 1× | 1 | · | part |
| 2 | Probe Arm | spin-coater-probe-arm | 1× | 1 | · | part |
| 3 | Thickness Display | spin-coater-display-unit | 1× | 1 | · | part |