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Wafer Collet

Assembly

Vacuum chuck and mechanical indexing for wafer holding and positioning during cutting. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.

Bill of materials for Wafer Collet

4 top-level lines as of r185973
# Item / sub-assembly Part no. Qty/assy Ext. qty Parts Type
1 Chuck Plate wafer-dicing-saw-chuck-plate 1× 1 · part
2 Vacuum Supply wafer-dicing-saw-vacuum-supply 1× 1 · part
3 Clamp Pins wafer-dicing-saw-clamp-pins 1× 1 · part
4 Pressure Sensor pressure-sensor 1× 1 · part