Coolant System
AssemblyCirculation pump and filtration maintaining coolant flow to blade and wafer during cutting. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Coolant System
4 top-level lines as of r185971| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Coolant Pump | wafer-dicing-saw-coolant-pump | 1× | 1 | · | part |
| 2 | Coolant Tank | wafer-dicing-saw-filter-tank | 1× | 1 | · | part |
| 3 | Spray Nozzle | wafer-dicing-saw-spray-nozzle | 1× | 1 | · | part |
| 4 | Drain System | wafer-dicing-saw-drain-return | 1× | 1 | · | part |