Environmental Control
AssemblyThermal chuck heater and humidity sensor for parametric wafer characterization at controlled temperature. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Environmental Control
4 top-level lines as of r186002| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Heating Element | heating-element | 1× | 1 | · | part |
| 2 | Pressure Sensor | pressure-sensor | 1× | 1 | · | part |
| 3 | Thermocouple Probe | wafer-prober-thermocouple | 1× | 1 | · | part |
| 4 | Relay | relay | 1× | 1 | · | part |