Loader Module
AssemblyAutomatic FOUP interface and wafer shuttle mechanism for loading 25-150mm diameter wafers into the chuck. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Loader Module
4 top-level lines as of r185999| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Robotic Arm | wafer-prober-carrier-arm | 1× | 1 | · | part |
| 2 | FOUP Dock | wafer-prober-foup-interface | 1× | 1 | · | part |
| 3 | Linear Shuttle | wafer-prober-linear-shuttle | 1× | 1 | · | part |
| 4 | Blower Motor | blower-motor | 1× | 1 | · | part |