Vacuum Pump
PartOil-sealed rotary vane pump delivering 100–200 CFM at 10–15 inHg for wafer hold. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Oil-sealed rotary vane pump delivering 100–200 CFM at 10–15 inHg for wafer hold. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.