Wafer Chuck Assembly
AssemblyVacuum-held precision chuck for wafer with XY theta motor positioning. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Wafer Chuck Assembly parts and their functions
6 top-level parts · 11 parts in total · full bill of materials below
| # | Part | Qty | What it does |
|---|---|---|---|
| 1 | Chuck Plate | 1× | Ceramic or aluminum wafer holding surface |
| 2 | Vacuum Supply Module | 1× | Vacuum channels and regulated pump |
| 3 | Ball Screw | 2× | X and Y linear drive for coarse positioning |
| 4 | Encoder | 2× | Rotary feedback on XY axes |
| 5 | Theta Spindle | 1× | Stepper motor with backlash-free drive |
| 6 | Ball Bearing | 4× | Support bearings for stage structure |
3D model
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Build & assembly graph
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Bill of materials for Wafer Chuck Assembly
6 top-level lines · 6 rows shown · 11 parts total · indented to 3 levels| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Chuck Plate | mask-aligner-chuck-plate | 1× | 1 | · | part |
| 2 | Vacuum Supply Module | mask-aligner-chuck-vacuum | 1× | 1 | · | part |
| 3 | Ball Screw | ball-screw | 2× | 2 | · | part |
| 4 | Encoder | encoder | 2× | 2 | · | part |
| 5 | Theta Spindle | mask-aligner-theta-spindle | 1× | 1 | · | part |
| 6 | Ball Bearing | ball-bearing | 4× | 4 | · | part |
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Where the wafer chuck assembly is used
1 product across 1 domain contain it, directly or inside a sub-assemblyUsed in 1 assembly
Sourcing: possible vendors
Browse the supplier directory → Prices, MOQ, and lead times are algorithmic estimates, not quotes, and not claims about these companies. Company mappings are curated by keyword; est. price band $0.50–$100. How estimates work| Vendor | HQ | Specialty | MOQ | Lead time |
|---|---|---|---|---|
|
🇨🇳Foxconn
foxconn.com ↗
|
Shenzhen, CN | Electronics contract mfg | 1,000 pcs | 6–10 wks |
| flex.com ↗ | Singapore | Electronics contract mfg | 1,000 pcs | 6–10 wks |
| dixoninfo.com ↗ | Noida, IN | Electronics contract mfg | 1,000 pcs | 6–10 wks |
| bydelectronic.com ↗ | Shenzhen, CN | Electronics contract mfg | 1,000 pcs | 6–10 wks |
| venture.com.sg ↗ | Singapore | Electronics contract mfg | 1,000 pcs | 6–10 wks |