Stage Assembly
AssemblyPrecision XY theta motorized stages with sub-micron repeatability for wafer positioning. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Stage Assembly
5 top-level lines as of r185969| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Ball Screw | ball-screw | 2× | 2 | · | part |
| 2 | Encoder | encoder | 3× | 3 | · | part |
| 3 | Theta Drive Motor | wafer-dicing-saw-theta-drive | 1× | 1 | · | part |
| 4 | Ball Bearing | ball-bearing | 8× | 8 | · | part |
| 5 | Sheet Metal Panel | sheet-panel | 2× | 2 | · | part |