Stage Assembly
AssemblyPrecision XY theta positioning table with vacuum-held wafer chuck and micron-level alignment capability. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Stage Assembly
6 top-level lines as of r185996| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Vacuum Chuck | wafer-prober-chuck | 1× | 1 | · | part |
| 2 | Ball Screw | ball-screw | 2× | 2 | · | part |
| 3 | Encoder | encoder | 2× | 2 | · | part |
| 4 | Theta Spindle | wafer-prober-theta-spindle | 1× | 1 | · | part |
| 5 | Ball Bearing | ball-bearing | 8× | 8 | · | part |
| 6 | Sheet Metal Panel | sheet-panel | 2× | 2 | · | part |