Wafer Chuck Assembly
AssemblyVacuum-held precision chuck for wafer with XY theta motor positioning. A full specification article for this item is being written. Meanwhile its bill of materials and connections are below.
Bill of materials for Wafer Chuck Assembly
6 top-level lines as of r103185| # | Item / sub-assembly | Part no. | Qty/assy | Ext. qty | Parts | Type |
|---|---|---|---|---|---|---|
| 1 | Chuck Plate | mask-aligner-chuck-plate | 1× | 1 | · | part |
| 2 | Vacuum Supply Module | mask-aligner-chuck-vacuum | 1× | 1 | · | part |
| 3 | Ball Screw | ball-screw | 2× | 2 | · | part |
| 4 | Encoder | encoder | 2× | 2 | · | part |
| 5 | Theta Spindle | mask-aligner-theta-spindle | 1× | 1 | · | part |
| 6 | Ball Bearing | ball-bearing | 4× | 4 | · | part |